Publications > Precision Motion Control

Papers - Precision Motion Control

This list contains recent publications only and may not be complete. Please refer to Prof. Tomizuka's publications page for a comprehensive list.

• Benjamin Fine, Hoday Stearns, Masayoshi Tomizuka, "Identification in Iterative Learning Control for Iteration-Varing Learning Filter", the 2nd Annual Dynamic Systems and Control Conference, Hollywood, CA, 2009.
• Hoday Stearns, Benjamin Fine, Masayoshi Tomizuka, "Iterative Identification of Feedforward Controllers for Iterative Learning Control," the 9th IFAC Symposium on Robot Control, Gifu, Japan, 2009.
• Hoday Stearns, Shuwen Yu, Benjamin Fine, Sandipan Mishra, Masayoshi Tomizuka, "A Comparative Study Of Feedforward Tuning Methods For Wafer Scanning Systems," 2008 ASME Dynamic Systems and Control Conference, Ann Arbor, Michigan, October 20-22, 2008.
• S. Mishra and M. Tomizuka, "Iterative Learning Control Design for Waferstage Positioning based on Orthogonal Projection," American Control Conference, Seattle, USA, Jun 2008.
• H. Stearns, S. Mishra and M. Tomizuka, "Iterative Tuning of Feedforward Controller with Force Ripple Compensation for Waferstage," Proceedings of the 10th IEEE International Workshop on Advanced Motion Control, Trento, Italy, Mar 2008.
• N. Ma, J. Ghan, S. Mishra, C. Spanos and K. Poolla, "Automatic Hotspot Classification using Pattern based Clustering," Proceedings of the 2008 SPIE Conference on Advanced Lithography, San Jose, California, February 2008.
• S. Mishra and M. Tomizuka. "Iterative Learning Control for Waferstage Positioning based on Orthogonal Projection," Proceedings of 46th IEEE Conference on Decision and Control, New Orleans, USA, Dec. 2007.
• S-W. Yu, S. Mishra and M. Tomizuka, "On-line Force Ripple Identification and Compensation in Precision Positioning of Waferstages," Proceedings of the International Mechanical Engineering Congress and RD&D Expo, Seattle, USA, November 2007.
• K-Y. Li, S. Mishra and A. Roorda, "Simulation and Experimental Demonstration of a Linearized Adaptive Optics Control Loop," Optical Society of America Fall Vision Meeting, Berkeley, California, September 2007.
• S. Mishra and M. Tomizuka. "Segmented Iterative Learning Control for Precision Positioning of Waferstages," Proceedings of the IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Zurich, Switzerland, September 2007.
• S. Mishra and M. Tomizuka, "Projection-based Iterative Learning Control for Wafer Scanner Systems: An Application of Segmented Iterative Learning Control," Under review, IEEE Transactions on Mechatronics, July 2007.
• S. Mishra, J. Coaplen and M. Tomizuka, "Precision Positioning of Wafer Scanners: An Application of Segmented Iterative Learning Control," IEEE Control Systems Magazine, vol. 27, No.4, pp.21-25, Aug 2007.
• Sandipan Mishra and Masayoshi Tomizuka, "An Optimization-based Approach for Design of Iterative Learning Controllers with Accelerated Rates of Convergence," 44th IEEE Conference on Decision and Control, pp.2427-2432, Seville, Spain, Dec. 2005.
• S. Mishra, M. Yamada and M. Tomizuka, "Repetitive Control for Rejection of Periodic Multiplicative Disturbances and Adaptive Identification of the Unknown Period," Proceedings of the International Mechanical Engineering Congress and RD&D Expo, Anaheim, USA, Dec 2004.
• Sandipan Mishra and Masayoshi Tomizuka, "An Adaptive Repetitive Controller for Rejection of Periodic Disturbances," Proceedings of the 2004 Japan-USA Symposium on Flexible Automation, Denver, CO, July 2004.
• Jia-Yush Yen, Yang-Lin Chen and Masayoshi Tomizuka, "Variable Sampling Rate Controller Design for Brushless DC Motor,"Proceedings of the IEEE 41st Conference on Decision and Control, Taipei, Taiwan, Dec. 2002.
• D.J. Lee and Masayoshi Tomizuka, "Cogging Force Compensation via Extended Kalman Filter in Precision Motion Control of a Linear System," Proceedings of the 2002 Japan-USA Symposium on Flexible Automation, Hiroshima, Japan, pp.1171-1176, July 2002.